MOSIS SCMOS - Via2, Metal3

SCMOS Layout Rules - Metal3

Rule Description Lambda

15.1 Minimum width 5

15.2 Minimum spacing to metal3 3

15.3 Minimum overlap of via2 2

Rule	Description	Lambda
15.1	Minimum width	5
15.2	Minimum spacing to metal3	3
15.3	Minimum overlap of via2	2